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基本説明
Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, X-ray lithography, laser chemical vapor deposition, laser photopolimerization, laser ablation.
Full Description
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Contents
1 Ion Beam.- 2 X-ray Lithography.- 3 Laser Chemical Vapor Deposition.- 4 Laser Photopolymerization.- 5 Laser Ablation.- 6 Thin Films.- References.