Full Description
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and, environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (including functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. This work shows engineers & students how to evaluate the potential value of current and near-future manufacturing processes for miniaturized systems in industrial environments. It explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro. It discusses issues for practical application cases; possibilities of dimension precision; and, large volume manufacturing of micro- & nanostructures (machines, materials, costs). This work explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and, displays (beamers, LCD, TFT). Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling.
