Chemical Vapor Deposition (Surface Engineering Series, Vol 2)

Chemical Vapor Deposition (Surface Engineering Series, Vol 2)

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  • 製本 Hardcover:ハードカバー版／ページ数 450 p.
  • 言語 ENG
  • 商品コード 9780871706928
  • DDC分類 660

基本説明

Contents: Basic Principles, Thermodynamics, and Kinetics; Stresses and Mechanical Stability; Polarized Electrochemical-Vapor Deposition; CVD Films in Tribological Applications; and more.

Full Description


Surface modification through chemical vapor deposition is becoming increasingly important in extending service life of many parts exposed to severe environmental conditions. This reference book presents the basic principles and process characteristics of chemical vapor deposition, as well as the details of several innovative approaches to its application in a wide variety of industrial applications. Key Features: Provides detailed descriptions of several novel methods of CVD technology. Contents: Introduction Basic Principles, Thermodynamics, and Kinetics Stresses and Mechanical Stability Combustion Chemical Vapor Deposition Polarized Electrochemical-Vapor Deposition Chemical Vapor Infiltration Metal-Organic CVD of High-Dielectric (Ba, Sr) Ti03 Thin Films for Dynamic RAM Applications CVD of Plastic and Polymers CVD Diamond, Diamond-Like Carbon, and Carbonitride Coatings CVD Films in Tribological Applications CVD Films for Electrical-Insulation and Corrosion-Protection Coatings Heat Treatment of CVD-Coated Tool Steels Future Developments and Directions.

Contents

* Introduction * Basic Principles, Thermodynamics, and Kinetics * Stresses and Mechanical Stability * Combustion Chemical Vapor Deposition * Polarized Electrochemical-Vapor Deposition * Chemical Vapor Infiltration * Metal-Organic CVD of High-Dielectric (Ba, Sr) Ti03 Thin Films for Dynamic RAM Applications * CVD of Plastic and Polymers * CVD Diamond, Diamond-Like Carbon, and Carbonitride Coatings * CVD Films in Tribological Applications * CVD Films for Electrical-Insulation and Corrosion-Protection Coatings * Heat Treatment of CVD-Coated Tool Steels * Future Developments and Directions.