金属薄膜の物理的特質 The Physical Properties of Thin Metal Films

Zhigal'skii, G.P. (EDT)/ Jones, Brian K. (EDT)

CRC Press（2003/07発売）

• 製本 Hardcover:ハードカバー版／ページ数 230 p.
• 言語 ENG
• 商品コード 9780415283908
• DDC分類 530.4275

Full Description

Thin films of conducting materials, such as metals, alloys and semiconductors are currently in use in many areas of science and technology, particularly in modern integrated circuit microelectronics that require high quality thin films for the manufacture of connection layers, resistors and ohmic contacts. These conducting films are also important for fundamental investigations in physics, radio-physics and physical chemistry. Physical Properties of Thin Metal Films provides a clear presentation of the complex physical properties particular to thin conducting films and includes the necessary theory, confirming experiments and applications. The volume will be an invaluable reference for graduates, engineers and scientists working in the electronics industry and fields of pure and applied science.

Contents

Conduction in Discontinuous Films. Size-effects in Thin Metal Films. Internal Mechanical Stresses and Voids in Thin Metal Films. Electrical Noise in Thin Films and Thin-Film Structures. Non-linear Conduction and Non-Equilibrium Noise in Thin Films. Degradation Mechanisms in Thin Metal Films.